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Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition
by
Toukabri, Rim
,
Shi, Yujun
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Physical chemistry chemical physics : PCCP
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Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor
by
YUJUN SHI
,
XINMAO LI
,
LING TONG
,
TOUKABRI, Rim
,
EUSTERGERLING, Brett
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Physical chemistry chemical physics : PCCP
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Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor depositionElectronic supplementary information (ESI) available. See DOI: 10.1039...
by
Toukabri, Rim
,
Shi, Yujun
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Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry
by
Toukabri, Rim
,
Shi, Yujun
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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