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Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
by
Chakraborty, B.R.
,
Halder, S.K.
,
Maurya, K.K.
,
Srivastava, A.K.
,
Toutam, V.K.
,
Dalai, M.K.
,
Sehgal, G.
,
Singh, S.
Published in
Thin solid films
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Thin Solid Films
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Atomic Mixing
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Defects And Impurities: Doping, Implantation, Distribution, Concentration, Etc
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Depth Resolution
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Electron, Ion, And Scanning Probe Microscopy
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Exact Sciences And Technology
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Kelvin Probe Force Spectroscopy
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Nanocrystalline Materials
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Nanoscale
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Nanoscale Materials And Structures: Fabrication And Characterization
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Physical Sciences
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Physics
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Physics, Applied
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Physics, Condensed Matter
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Science & Technology
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Structure And Morphology; Thickness
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Sciencedirect Journals
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Elsevier Sciencedirect Freedom Collection 2023
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Elsevier Sd Backfile Materials Science
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Sciencedirect Physics Backfile
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