Search Results - Tritchkov, Alexander

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  1. 1
    Study on various curvilinear data representations and their impact on mask and wafer manufacturing

    Study on various curvilinear data representations and their impact on mask and wafer manufacturing by Choi, Jin, Ryu, Soo, Lee, Sukho, Kim, Minah, Park, JoonSoo, Buck, Peter, Bork, Ingo, Durvasula, Bhardwaj, Gharat, Sayalee, Rao, Nageswara, Pai, Ravi, Koranne, Sandeep, Tritchkov, Alexander

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  2. 2
    Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems

    Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems by Melville, David O. S., Rosenbluth, Alan E., Waechter, Andreas, Millstone, Marc, Tirapu-Azpiroz, Jaione, Tian, Kehan, Lai, Kafai, Inoue, Tadanobu, Sakamoto, Masaharu, Adam, Kostas, Tritchkov, Alexander

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  3. 3
    Proximity Effects Correction for Advanced Optical Lithography Processes

    Proximity Effects Correction for Advanced Optical Lithography Processes by Tritchkov, Alexander, Finders, Jo, Randall, John, Ronse, Kurt, Vandenhove, Luc

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  4. 4
    Lithography simulation with aerial image — Variable threshold resist model

    Lithography simulation with aerial image — Variable threshold resist model by Randall, John, Gangala, Hareen, Tritchkov, Alexander

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