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Local laser oxidation of titanium film for the post-fabrication trimming of photonic integrated circuits
by
Tronev, Aleksandr V.
,
Parfenov, Mikhail V.
,
Bozhko, Sergey I.
,
Ionov, Andrey M.
,
Mozhchil, Rais N.
,
Chekmazov, Sergey V.
,
Agruzov, Petr M.
,
Ilichev, Igor V.
,
Shamrai, Aleksandr V.
Published in
Optical materials express
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Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits
by
Tronev, Aleksandr V
,
Parfenov, Mikhail V
,
Bozhko, Sergey I
,
Ionov, Andrey M
,
Mozhchil, Rais N
,
Chekmazov, Sergey V
,
Agruzov, Petr M
,
Ilichev, Igor V
,
Shamrai, Aleksandr V
Published in
arXiv.org
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Arxiv.org
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Optical Materials Express
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Dielectric Waveguides
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Dielectrics
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Integrated Circuits
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Lithium Niobates
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Mach-Zehnder Interferometers
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Optical Waveguides
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Oxidation
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Photonics
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Refractivity
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Titanium
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Trimming
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Absorptivity
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Materials Science
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Materials Science, Multidisciplinary
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Optics
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Phase Control
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Physics - Applied Physics
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Physics - Optics
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