Search Results - Tsai, Chia-Shone

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    Plasma charging damage during contact hole etch in high-density plasma etcher

    Plasma charging damage during contact hole etch in high-density plasma etcher by Tsui, Bing-Yue, Lin, Shyue-Shyh, Tsai, Chia-Shone, Hsia, Chin C

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  2. 2
    Compounding effects of UV exposure, ion bombardment, electron shading and plasma charging in a high density plasma poly etcher

    Compounding effects of UV exposure, ion bombardment, electron shading and plasma charging in a high density plasma poly etcher by Shyue-Shyh Lin, Bing-Yue Tsui, Chia-Shone Tsai, Hsia, C.C.

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    Plasma damage during dielectric etch in high density plasma etcher

    Plasma damage during dielectric etch in high density plasma etcher by Bing-Yue Tsui, Shyue-Shyh Lin, Chia-Shone Tsai, Hsia, C.C.

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