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Ion implantation in Al/sub x/Ga/sub 1-x/As: damage structures and amorphization mechanisms
by
Lagow, B.W.
,
Turkot, B.A.
,
Robertson, I.M.
,
Coleman, J.J.
,
Roh, S.D.
,
Forbes, D.V.
,
Rehn, L.E.
,
Baldo, P.M.
Published in
IEEE journal of selected topics in quantum electronics
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Ieee Journal Of Selected Topics In Quantum Electronics
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