Search Results - Turnquest, Karen

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  1. 1
    Influence of base additives on the reaction-diffusion front of model chemically amplified photoresists

    Influence of base additives on the reaction-diffusion front of model chemically amplified photoresists by Vogt, Bryan D., Kang, Shuhui, Prabhu, Vivek M., Rao, Ashwin, Lin, Eric K., Wu, Wen-li, Satija, Sushil K., Turnquest, Karen

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  2. 2
    Responding to the Challenge: Materials Design for Immersion Lithography

    Responding to the Challenge: Materials Design for Immersion Lithography by Padmanaban, Munirathna, Romano, Andrew, Lin, Guanyang, Chiu, Simon, Timko, Allen, Houlihan, Frank, Rahman, Dalil, Dammel, Ralph R., Turnquest, Karen, Rich, Georgia, Shuetter, Scott D., Shedd, Timonthy A., Nellis, Gregory A.

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  3. 3
    Measurements of the Reaction−Diffusion Front of Model Chemically Amplified Photoresists with Varying Photoacid Size

    Measurements of the Reaction−Diffusion Front of Model Chemically Amplified Photoresists with Varying Photoacid Size by Vogt, Bryan D, Kang, Shuhui, Prabhu, Vivek M, Lin, Eric K, Satija, Sushil K, Turnquest, Karen, Wu, Wen-li

    Published in Macromolecules
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  4. 4
    Effect of copolymer composition on acid-catalyzed deprotection reaction kinetics in model photoresists

    Effect of copolymer composition on acid-catalyzed deprotection reaction kinetics in model photoresists by Kang, Shuhui H., Prabhu, Vivek M., Vogt, Bryan D., Lin, Eric K., Wu, Wen-li, Turnquest, Karen

    Published in Polymer (Guilford)
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  5. 5
    Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy

    Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy by Kang, Shuhui, Vogt, Bryan D., Wu, Wen-li, Prabhu, Vivek M., VanderHart, David L., Rao, Ashwin, Lin, Eric K., Turnquest, Karen

    Published in Macromolecules
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  6. 6
    Responding to the Challenge

    Responding to the Challenge by Padmanaban, Munirathna, Romano, Andrew, Lin, Guanyang, Chiu, Simon, Timko, Allen, Houlihan, Frank, Rahman, Dalil, R. Dammel, Ralph, Turnquest, Karen, Rich, Georgia, D. Shuetter, Scott, A. Shedd, Timonthy, A. Nellis, Gregory

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