A Deep X-ray Lithography beamline at the Kurchatov Synchrotron Radiation Source: First results by Artemiev, A.N., Bushev, I.N., Kolyasnikov, V.A., Kovachov, G.A., Latish, O.E., Martynenko, V.V., Moryakov, V.P., Nikitin, B.I., Odintsov, D.G., Peredkov, S.S., Rakhimbabaev, T.Y., Stankevitch, V.G., Tzvid, E.S., Schmidt, M., Schmidt, A., Feiertag, G.

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