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    Characterization of (Ti, Al)N films prepared by ion mixing and vapor deposition

    Characterization of (Ti, Al)N films prepared by ion mixing and vapor deposition by Uchida, Hitoshi, Yamashita, Masato, Hanaki, Satoshi, Ueta, Takeaki

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    Characterization of (Ti, Al)N films prepared by ion mixing and vapor deposition

    Characterization of (Ti, Al)N films prepared by ion mixing and vapor deposition by UCHIDA, Hitoshi, YAMASHITA, Masato, HANAKI, Satoshi, UETA, Takeaki

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