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Piezoelectric microspeakers with high compressive ZnO film and floating electrode
by
Yi, SeungHwan
,
Yoon, ManSoon
,
Ur, SoonChul
Published in
Journal of electroceramics
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Dependence of material properties on piezoelectric microspeakers with AlN thin film
by
HeeChan Cho
,
SoonChul Ur
,
ManSoon Yoon
,
SeungHwan Yi
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Conference Proceeding
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MICROMACHINED PIEZOELECTRIC MICROSPEAKERS FABRICATED WITH HIGH QUALITY ALN THIN FILM
by
SEO, KYONGWON
,
PARK, JONGSEON
,
KIM, HYONGJUNG
,
KIM, DONGKI
,
UR, SOONCHUL
,
YI, SEUNGHWAN
Published in
Integrated ferroelectrics
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Integrated Ferroelectrics
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Journal Of Electroceramics
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Electrodes
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Floating Electrode
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Materials Science
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Microphones
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Sound Pressure Level
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Aln Film
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Aln Thin Film
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Ceramics
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Characterization And Evaluation Of Materials
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Chemistry And Materials Science
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Composites
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