Search Results - Uzoh, Cyprian E.

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    Characterization of copper layers grown by electrochemical mechanical deposition technique

    Characterization of copper layers grown by electrochemical mechanical deposition technique by Wang, Tony, Lindquist, Paul, Erdemli, Serkan, Basol, Erol C., Zhang, Richard, Uzoh, Cyprian E., Basol, Bulent M.

    Published in Thin solid films
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    Planarization Efficiency of Electrochemical Mechanical Deposition and Its Dependence on Process Parameters

    Planarization Efficiency of Electrochemical Mechanical Deposition and Its Dependence on Process Parameters by Basol, Bulent M, Erdemli, Serkan, Uzoh, Cyprian E, Wang, Tony

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