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    Failure analysis of integrated circuits beyond the diffraction limit : Contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal imaging : Near-field optics imaging

    Failure analysis of integrated circuits beyond the diffraction limit : Contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal... by LEWIS, Aaron, SHAMBROT, Efim, RADKO, Anna, LIEBERMAN, Klony, EZEKIEL, Solomon, VEINGER, Dimitry, YAMPOLSKI, Gila

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