Search Results - Väyrynen, Katja

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  1. 1
    Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

    Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films by Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

    Published in Chemistry of materials
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  2. 2
    Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)2 and Tertiary Butyl Hydrazine

    Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)2 and Tertiary Butyl Hydrazine by Väyrynen, Katja, Mizohata, Kenichiro, Räisänen, Jyrki, Peeters, Daniel, Devi, Anjana, Ritala, Mikko, Leskelä, Markku

    Published in Chemistry of materials
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  3. 3
    Nickel Germanide Thin Films by Atomic Layer Deposition

    Nickel Germanide Thin Films by Atomic Layer Deposition by Väyrynen, Katja, Vihervaara, Anton, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko J, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku

    Published in Chemistry of materials
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  4. 4
    Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors

    Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors by Miikkulainen, Ville, Väyrynen, Katja, Mizohata, Kenichiro, Räisänen, Jyrki, Vehkamäki, Marko, Ritala, Mikko

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  5. 5
    Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursors

    Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl2(TMPDA) and Tert‐Butylhydrazine as Precursors by Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko J., Mizohata, Kenichiro, Räisänen, Jyrki, Link, Joosep, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

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  6. 6
    (Invited) Photo-Assisted ALD: Process Development and Application Perspectives

    (Invited) Photo-Assisted ALD: Process Development and Application Perspectives by Miikkulainen, Ville, Väyrynen, Katja, Kilpi, Väinö, Han, Zhongmei, Vehkamäki, Marko, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko

    Published in ECS transactions
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  7. 7
    Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl 2 (TMPDA) and Tert‐Butylhydrazine as Precursors

    Atomic Layer Deposition of Nickel Nitride Thin Films using NiCl 2 (TMPDA) and Tert‐Butylhydrazine as Precursors by Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko J., Mizohata, Kenichiro, Räisänen, Jyrki, Link, Joosep, Stern, Raivo, Ritala, Mikko, Leskelä, Markku

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  8. 8
    Biology of childhood hepatoblastoma and the search for novel treatments

    Biology of childhood hepatoblastoma and the search for novel treatments by Pihlajoki, Marjut, Eloranta, Katja, Nousiainen, Ruth, Väyrynen, Ville, Soini, Tea, Kyrönlahti, Antti, Parkkila, Seppo, Kanerva, Jukka, Wilson, David B., Pakarinen, Mikko P., Heikinheimo, Markku

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  9. 9
    Screening Sleep Disordered Breathing in Stroke Unit

    Screening Sleep Disordered Breathing in Stroke Unit by Himanen, Sari-Leena, Tenhunen, Mirja, Keso, Anna, Miettinen, Katja, Numminen, Heikki, Kortelainen, Kati, Väyrynen, Kirsi, Huhtala, Heini

    Published in Sleep disorders
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