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Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation
by
Vallejo-Otero, V.
,
Crespo-Monteiro, N.
,
Valour, A.
,
Donnet, C.
,
Reynaud, S.
,
Ollier, N.
,
Blanc Mignon, M.F.
,
Chatelon, J.P.
,
Bleu, Y.
,
Gamet, E.
,
Jourlin, Y.
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Materials today advances
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Materials Today Advances
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Chemical Sciences
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Material Chemistry
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Materials Science
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Materials Science, Multidisciplinary
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Micro-Nanostructuring
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Optical Properties
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Rapid Thermal Nitridation
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Science & Technology
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Sol-Gel Method
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Zirconium Nitride
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