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Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence
by
Vereecke, G.
,
Arnauts, S.
,
Van Doorne, P.
,
Kenis, K.
,
Onsia, B.
,
Verstraeten, K.
,
Schaekers, M.
,
Van Hoeymissen, J.A.B.
,
Heyns, M.M.
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Spectrochimica acta. Part B: Atomic spectroscopy
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Electrocoagulation as a viable technique to treat (Cu-)CMP wastes
by
Van Hoeymissen, J.A.B.
,
Van den Broeck, K.
,
Van Hoornick, N.
,
Heyns, M.
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In situ HDP-CVD process diagnostics based on quadrupole mass spectrometry
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Hughes, C.
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Van Hoeymissen, J.A.B.
,
Heyns, M.
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