Search Results - Vandeweyer, Tom

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  1. 1
    Material Aspects and Challenges for SOI FinFET Integration

    Material Aspects and Challenges for SOI FinFET Integration by Van Dal, Mark J., Vellianitis, Georgios, Duffy, Ray, Doornbos, Gerben, Pawlak, Bartek, Duriez, Blandine, Lai, Lhi-Shue, Hikavyy, Andriy Y., Vandeweyer, Tom, Demand, Marc, Altamirano, Efrain, Rooyackers, Rita, Witters, Liesbeth, Collaert, Nadine, Jurczak, Malgorzata, Kaiser, Monja, Weemaes, Robbert G., Lander, Rob

    Published in ECS transactions
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  2. 2
    Ge-Source Vertical Tunnel FETs Using a Novel Replacement-Source Integration Scheme

    Ge-Source Vertical Tunnel FETs Using a Novel Replacement-Source Integration Scheme by Rooyackers, Rita, Vandooren, Anne, Verhulst, Anne S., Walke, Amey Mahadev, Simoen, Eddy, Devriendt, Katia, Lo-Corotondo, Sabrina, Demand, Marc, Bryce, George, Loo, Roger, Hikavyy, Andriy, Vandeweyer, Tom, Huyghebaert, Cedric, Collaert, Nadine, Thean, Aaron V. Y.

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  3. 3
    High Performance 70-nm Germanium pMOSFETs With Boron LDD Implants

    High Performance 70-nm Germanium pMOSFETs With Boron LDD Implants by Hellings, G., Mitard, J., Eneman, G., De Jaeger, B., Brunco, D.P., Shamiryan, D., Vandeweyer, T., Meuris, M., Heyns, M.M., De Meyer, K.

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  4. 4
    In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope

    In-Line Critical Dimension and Sidewall Roughness Metrology Study for Compound Nanostructure Process Control by in-Line 3D Atomic Force Microscope by Kim, Tae-Gon, Ryu, Heon-Yul, Jo, Ah-jin, Cho, Sang-Joon, Park, Sang-il, Vandeweyer, Tom

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  5. 5
    New lithographic requirements for the implant levels in scaled devices

    New lithographic requirements for the implant levels in scaled devices by Vandeweyer, Tom, Baerts, Christina, Horiguchi, Naoto, Ercken, Monique

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  6. 6
    A 400GHz fMAX fully self-aligned SiGe:C HBT architecture

    A 400GHz fMAX fully self-aligned SiGe:C HBT architecture by Van Huylenbroeck, S., Sibaja-Hernandez, A., Venegas, R., You, S., Winderickx, G., Radisic, D., Lee, W., Ong, P., Vandeweyer, T., Nguyen, N.D., De Meyer, K., Decoutere, S.

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