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Effect of HCl cleaning on InSb-Al2O3 MOS capacitors
by
Vavasour, Oliver J
,
Jefferies, Richard
,
Walker, Marc
,
Roberts, Joseph W
,
Meakin, Naomi R
,
Gammon, Peter M
,
Chalker, Paul R
,
Ashley, Tim
Published in
Semiconductor science and technology
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Effect of HCl cleaning on InSb–Al 2 O 3 MOS capacitors
by
Vavasour, Oliver J
,
Jefferies, Richard
,
Walker, Marc
,
Roberts, Joseph W
,
Meakin, Naomi R
,
Gammon, Peter M
,
Chalker, Paul R
,
Ashley, Tim
Published in
Semiconductor science and technology
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(Invited, Digital Presentation) Improved Reliability of 4H-SiC Metal-Oxide-Semiconductor Devices Utilising Atomic Layer Deposited Layers with Enhanced Interface Quality
by
Renz, Arne Benjamin Benjamin
,
Vavasour, Oliver J
,
Gammon, Peter Michael
,
Li, Fan
,
Dai, Tianxiang
,
Baker, Guy W C
,
Grant, Nicholas E
,
Murphy, John D
,
Mawby, P. A.
,
Shah, Vishal Ajit
,
Gott, James
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ECS transactions
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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Iopscience Extra
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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