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Adhesion and fracture of tantalum nitride films
by
Mody, N.R.
,
Hwang, R.Q.
,
Venka-taraman, S.
,
Angelo, J.E.
,
Norwood, D.P.
,
Gerberich, W.W.
Published in
Acta materialia
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Acta Materialia
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Subjects
Condensed Matter: Structure, Mechanical And Thermal Properties
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Exact Sciences And Technology
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Fracture Properties
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Interfaces
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Materials Science
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Materials Science, Multidisciplinary
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Mechanical And Acoustical Properties
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Metallurgy & Metallurgical Engineering
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Physical Properties Of Thin Films, Nonelectronic
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Physics
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Residual Stresses
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Science & Technology
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Surfaces And Interfaces; Thin Films And Whiskers
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Tantalum Nitrides
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Technology
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Thin Films
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Elsevier Sciencedirect Journals
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