Search Results - Vercaemst, A.S.

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    Hydrogen passivation caused by “soft” sputter etch cleaning of Si

    Hydrogen passivation caused by “soft” sputter etch cleaning of Si by Vercaemst, A.S, Van Meirhaeghe, R.L, Laflere, W.H, Cardon, F

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    On the influence of sputter etch cleaning on the silicidation, the thermal stability and the electrical characteristics of Ti/ p−Si contacts

    On the influence of sputter etch cleaning on the silicidation, the thermal stability and the electrical characteristics of Ti/ p−Si contacts by Vercaemst, A.S., Van Meirhaeghe, R.L., Laflère, W.H., Cardon, F., De Bosscher, W., Schreutelkamp, R.J.

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