Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memories by Molas, Gabriel, Bocquet, Marc, Buckley, Julien, Grampeix, Helen, Gély, Marc, Colonna, Jean-Philippe, Licitra, Christophe, Rochat, Névine, Veyront, Thomas, Garros, Xavier, Martin, François, Brianceau, Pierre, Vidal, Vincent, Bongiorno, Cosimo, Lombardo, Salvatore, Salvo, Barbara De, Deleonibus, Simon

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