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Novel metal gates for high κ applications
by
Chang, Mei
,
Chen, Michael S.
,
David, Anaïs
,
Gandikota, Srinivas
,
Ganguli, Seshadri
,
Hayden, Brian E.
,
Hung, Steven
,
Lu, Xinliang
,
Mormiche, Claire
,
Noori, Atif
,
Smith, Duncan C. A.
,
Vian, Chris J. B.
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Journal of applied physics
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Journal Of Applied Physics
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