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A 3D-CMOS compatible silicon photo-sensor with a large vertical photosensitive area
by
Sabri Alirezaei, Iman
,
Vierhaus, Jörg
,
Burte, Edmund P.
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Optical and quantum electronics
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Cleaning of Silicon Wafer Surfaces with Reactive Gases
by
Vierhaus, Joerg
,
Haase, Cornelia
,
Briesemeister, Jens
,
Burte, Edmund
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