A MEMS Microphone in a FOWLP by Theuss, Horst, Sigl, Alfred, Maier, Dominic, Goller, Bernd, Vobl, Matthias, Herrmann, Matthias, Lodermeyer, Johannes, Krumbein, Ulrich, Dehe, Alfons, Geissler, Christian, Muehlbauer, Franz-Xaver, von Waechter, Claus, Kilger, Thomas, Wagner, Juergen, Fischer, Thomas, Bartl, Ulf, Helbig, Stephan

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