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Search Results - Volkos, S.N.
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Reliability degradation of thin HfO2/SiO2 gate stacks by remote RF hydrogen and deuterium plasma treatment
by
EFTHYMIOU, E
,
BERNARDINI, S
,
ZHANG, J. F
,
VOLKOS, S. N
,
HAMILTON, B
,
PEAKER, A. R
Published in
Thin solid films
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Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing
by
TSOUTSOU, D
,
SCAREL, G
,
DEBERNARDI, A
,
CAPELLI, S. C
,
VOLKOS, S. N
,
LAMAGNA, L
,
SCHAMM, S
,
COULON, P. E
,
FANCIULLI, M
Published in
Microelectronic engineering
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Reliability nano-characterization of thin SiO2 and HfSixOy/SiO2 gate stacks
by
EFTHYMIOU, E
,
BERNARDINI, S
,
VOLKOS, S. N
,
HAMILTON, B
,
ZHANG, J. F
,
UPPAL, H. J
,
PEAKER, A. R
Published in
Microelectronic engineering
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Reliability degradation of thin HfO 2/SiO 2 gate stacks by remote RF hydrogen and deuterium plasma treatment
by
Efthymiou, E.
,
Bernardini, S.
,
Zhang, J.F.
,
Volkos, S.N.
,
Hamilton, B.
,
Peaker, A.R.
Published in
Thin solid films
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Erratum to “Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing” Microelectronic Engineering 85 (2008) 2411–2413...
by
Tsoutsou, D.
,
Scarel, G.
,
Debernardi, A.
,
Capelli, S.C.
,
Volkos, S.N.
,
Lamagna, L.
,
Schamm, S.
,
Coulon, P.E.
,
Fanciulli, M.
Published in
Microelectronic engineering
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Erratum to “Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La 2O 3 films upon annealing” Microelectronic Engineering 85 (2008) 2411–2413...
by
Tsoutsou, D.
,
Scarel, G.
,
Debernardi, A.
,
Capelli, S.C.
,
Volkos, S.N.
,
Lamagna, L.
,
Schamm, S.
,
Coulon, P.E.
,
Fanciulli, M.
Published in
Microelectronic engineering
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Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La 2O 3 films upon annealing
by
Tsoutsou, D.
,
Scarel, G.
,
Debernardi, A.
,
Capelli, S.C.
,
Volkos, S.N.
,
Lamagna, L.
,
Schamm, S.
,
Coulon, P.E.
,
Fanciulli, M.
Published in
Microelectronic engineering
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Reliability nano-characterization of thin SiO 2 and HfSi xO y/SiO 2 gate stacks
by
Efthymiou, E.
,
Bernardini, S.
,
Volkos, S.N.
,
Hamilton, B.
,
Zhang, J.F.
,
Uppal, H.J.
,
Peaker, A.R.
Published in
Microelectronic engineering
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Nanoscale electrical characterization of ultrathin high- k dielectric MOS stacks: A conducting AFM study
by
Uppal, H.J.
,
Bernardini, S.
,
Efthymiou, E.
,
Volkos, S.N.
,
Dimoulas, A.
,
Markevich, V.
,
Hamilton, B.
,
Peaker, A.R.
Published in
Materials science in semiconductor processing
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Extrinsic stacking fault generation related to high– k dielectric growth on a Si substrate
by
Volkos, S.N.
,
Bernardini, S.
,
Rigopoulos, N.
,
Efthymiou, E.S.
,
Hawkins, I.D.
,
Hamilton, B.
,
Dobaczewski, L.
,
Hall, S.
,
Hurley, P.K.
,
Delabie, A.
,
Peaker, A.R.
Published in
Microelectronic engineering
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Negative-bias-temperature-instability in metal–insulator–semiconductor structures
by
Volkos, S.N.
,
Peaker, A.R.
,
Hawkins, I.D.
,
Efthimiou, E.
,
Petkos, G.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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