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A novel program-erasable high-κ AlN-Si MIS capacitor
by
LAI, C. H
,
CHIN, Albert SR
,
HUNG, B. F
,
CHENG, C. F
,
WON JONG YOO, SR
,
LI, M. F
,
CHUNXIANG ZHU
,
MCALISTER, S. P
,
KWONG, Dim-Lee
Published in
IEEE electron device letters
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Ieee Electron Device Letters
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Aluminum Oxide
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Applied Sciences
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Capacitors
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Density
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Dielectric, Amorphous And Glass Solid Devices
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Dielectrics
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Electric Potential
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Electronics
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Exact Sciences And Technology
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Management Information Systems
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Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
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Voltage
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