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    Dopant Activation in Single-Crystalline Germanium by Low-Temperature Microwave Annealing

    Dopant Activation in Single-Crystalline Germanium by Low-Temperature Microwave Annealing by LEE, Yao-Jen, CHUANG, Shang-Shiun, HSUEH, Fu-Kuo, LIN, Ho-Ming, WU, Shich-Chuang, WU, Ching-Yi, TSENG, Tseung-Yuen

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