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Search Results - Wang, Junzhuan (军转 王)
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Growth and microstructure properties of microcrystalline silicon films deposited using jet-ICPCVD
by
Zuo, Zewen (则文 左)
,
Guan, Wentian (文田 管)
,
Xin, Yu (煜辛)
,
Lu, Jin (锦闾)
,
Wang, Junzhuan (军转 王)
,
Pu, Lin (林濮)
,
Shi, Yi (毅施)
,
Zheng, Youdou (有炓 郑)
Published in
Journal of semiconductors
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Journal Of Semiconductors
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Convective Transfer
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Crystallinity
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Deposition
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Film Growth
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High Rate
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Inductively Coupled Plasma
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Jet-Icpcvd
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Microcrystalline Silicon
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Microstructure
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Physical Sciences
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Physics
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Physics, Condensed Matter
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Precursors
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Science & Technology
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Semiconductors
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Silicon Films
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Institute Of Physics
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