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Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures
by
Chang, Chienliu
,
Wang, Yeong-Feng
,
Kanamori, Yoshiaki
,
Shih, Ji-Jheng
,
Kawai, Yusuke
,
Lee, Chih-Kung
,
Wu, Kuang-Chong
,
Esashi, Masayoshi
Published in
Journal of micromechanics and microengineering
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Design and construction of linear laser encoders that possess high tolerance of mechanical runout
by
Lee, Chih-Kung
,
Wu, Chyan-Chyi
,
Chen, Shih-Jui
,
Yu, Liang-Bin
,
Chang, You-Chia
,
Wang, Yeong-Feng
,
Chen, Jau-Yu
,
Wu, Jeremy Wen-jong
Published in
Applied optics (2004)
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