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Thin-Film Thermal Conductivity Measurement Using Microelectrothermal Test Structures and Finite-Element-Model-Based Data Analysis
by
Stojanovic, N.
,
Jongsin Yun
,
Washington, E.B.K.
,
Berg, J.M.
,
Holtz, M.W.
,
Temkin, H.
Published in
Journal of microelectromechanical systems
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Journal Of Microelectromechanical Systems
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Aluminum
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Biomembranes
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Colloidal State And Disperse State
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Conductive Films
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