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Collapse-free patterning of high aspect ratio silicon structures for 20nm NAND Flash technology
by
Iyengar, Vikram V.
,
Chandrasekaran, Suresh
,
Weddington, Darryl
,
Nettles, Monte M.
,
Eagle, Oliver H.
,
Tey, Shin Hwee
,
Parry, Thad B.
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An assessment of a dilute hydrofluoric acid purifier
by
Weddington, Darryl
,
Bodnar, John
,
Jahanbani, Mo
,
Blum, Roger
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Semiconductor international
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