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From zero- to second-level packaging of RF-MEMS devices
by
Jourdain, A.
,
Vaesen, K.
,
Scheer, J.M.
,
Weekamp, J.W.
,
van Beek, J.T.M.
,
Tilmans, H.A.C.
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Conference Proceeding
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MEMS tunable capacitors and switches for RF applications
by
Rijks, T.G.S.M.
,
van Beek, J.T.M.
,
Steeneken, P.G.
,
Ulenaers, M.J.E.
,
van Eerd, P.
,
Den Toonder, J.M.J.
,
van Dijken, A.R.
,
De Coster, J.
,
Puers, R.
,
Weekamp, J.W.
,
Scheer, J.M.
,
Jourdain, A.
,
Tilmans, H.A.C.
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