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    Polymerizable Olefins Groups in Antimony EUV Photoresists

    Polymerizable Olefins Groups in Antimony EUV Photoresists by Murphy, Michael, Upadhyay, Nitinkumar S., Ali, Munsaf, Passarelli, James, Grzeskowiak, Jodi, Weires, Maximillian, Brainard, Robert L.

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