Search Results - Werbaneth, Paul

  • Showing 1 - 19 results of 19
Refine Results
  1. 1
    Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance

    Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance by Xing, Gary, Werbaneth, Paul, Treur, Randy, Barros, Phil

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference by Bickford, Jeanne Paulette, Cunff, Delphine Le, Buengener, Ralf, Radloff, Stefan, Werbaneth, Paul

    Get full text
    Article
    Save to List
    Saved in:
  3. 3
    Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference by Bickford, Jeanne Paulette, Patterson, Oliver D., Le Cunff, Delphine, Buengener, Ralf, Radloff, Stefan, Werbaneth, Paul

    Get full text
    Article
    Save to List
    Saved in:
  4. 4
    Guest Editorial Special Section on the 2019 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2019 SEMI Advanced Semiconductor Manufacturing Conference by Bickford, Jeanne Paulette, Patterson, Oliver D., Radloff, Stefan, Werbaneth, Paul

    Get full text
    Article
    Save to List
    Saved in:
  5. 5
    Guest Editorial Special Section on the 2020 and 2021 SEMI Advanced Semiconductor Manufacturing Conferences

    Guest Editorial Special Section on the 2020 and 2021 SEMI Advanced Semiconductor Manufacturing Conferences by Patterson, Oliver D., Le Cunff, Delphine, Buengener, Ralf, Radloff, Stefan, Werbaneth, Paul, Bickford, Jeanne Paulette

    Get full text
    Article
    Save to List
    Saved in:
  6. 6
    Guest Editorial Special Section on the 2018 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2018 SEMI Advanced Semiconductor Manufacturing Conference by Patterson, Oliver D., Bickford, Jeanne Paulette, Radloff, Stefan, Werbaneth, Paul

    Get full text
    Article
    Save to List
    Saved in:
  7. 7
    Special Section on the 2017 SEMI Advanced Semiconductor Manufacturing Conference

    Special Section on the 2017 SEMI Advanced Semiconductor Manufacturing Conference by Werbaneth, Paul, Bickford, Jeanne Paulette, Patterson, Oliver D., Radloff, Stefan

    Get full text
    Article
    Save to List
    Saved in:
  8. 8
    Guest Editorial Special Section on the 2015 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2015 SEMI Advanced Semiconductor Manufacturing Conference by Werbaneth, Paul, Braggin, Jennifer, Eisenbraun, Eric, Radloff, Stefan, Weber, Charles

    Get full text
    Article
    Save to List
    Saved in:
  9. 9
    Guest Editorial Special Section on the 2016 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2016 SEMI Advanced Semiconductor Manufacturing Conference by Patterson, Oliver D., Werbaneth, Paul, Bickford, Jeanne Paulette, Radloff, Stefan

    Get full text
    Article
    Save to List
    Saved in:
  10. 10
    Special Section on the 2011 Advanced Semiconductor Manufacturing Conference

    Special Section on the 2011 Advanced Semiconductor Manufacturing Conference by Patterson, Oliver D., Werbaneth, Paul, Eisenbraun, Eric

    Get full text
    Article
    Save to List
    Saved in:
  11. 11
    Editorial Special Section on the 2013 SEMI Advanced Semiconductor Manufacturing Conference

    Editorial Special Section on the 2013 SEMI Advanced Semiconductor Manufacturing Conference by Werbaneth, Paul, Braggin, Jennifer, Radloff, Stefan, Weber, Charles

    Get full text
    Article
    Save to List
    Saved in:
  12. 12
    Special Section on the 2014 SEMI Advanced Semiconductor Manufacturing Conference

    Special Section on the 2014 SEMI Advanced Semiconductor Manufacturing Conference by Patterson, Oliver D., Werbaneth, Paul, Braggin, Jennifer, Radloff, Stefan

    Get full text
    Article
    Save to List
    Saved in:
  13. 13
    Guest Editorial Special Section on the 2012 SEMI Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the 2012 SEMI Advanced Semiconductor Manufacturing Conference by Patterson, Oliver D., Werbaneth, Paul, Braggin, Jennifer, Pulvirent, Lawrence

    Get full text
    Article
    Save to List
    Saved in:
  14. 14
    Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference

    Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference by Eisenbraun, E, Kahlen, F, Werbaneth, P, Pandit, V

    Get full text
    Article
    Save to List
    Saved in:
  15. 15
    Production manufacturing of PZT-based devices: Plasma etch process optimization and results for PZT used as a ferroelectric, as a High k dielectric, and as a piezoelectric material

    Production manufacturing of PZT-based devices: Plasma etch process optimization and results for PZT used as a ferroelectric, as a High k dielectric, and as a piezoelectric material by Werbaneth, Paul F.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  16. 16
    MEMS sensors for novel functionality in tomorrow's appliances: and enjoy the advantages of disruptive or sustaining innovation in your products

    MEMS sensors for novel functionality in tomorrow's appliances: and enjoy the advantages of disruptive or sustaining innovation in your products by Chung, Charles, Werbaneth, Paul

    Published in Appliance design
    Get full text
    Magazinearticle
    Save to List
    Saved in:
  17. 17
    Observations on the chemistry and physics of STI etch in [Cl.sub.2]-Ar plasmas

    Observations on the chemistry and physics of STI etch in [Cl.sub.2]-Ar plasmas by Werbaneth, Paul, Almerico, John

    Published in Solid state technology
    Get full text
    Magazinearticle
    Save to List
    Saved in:
  18. 18
    Optimizing plasma etch for MEMS devices

    Optimizing plasma etch for MEMS devices by Werbaneth, Paul

    Published in Solid state technology
    Get full text
    Magazinearticle
    Save to List
    Saved in:
  19. 19
    Adapting semiconductor processing tools to thin film head fabrication

    Adapting semiconductor processing tools to thin film head fabrication by Werbaneth, Paul, Kirshman, Sam, Slomowitz, Harry, Thomas, Jim

    Published in Solid state technology
    Get full text
    Magazinearticle
    Save to List
    Saved in:

Search Tools: