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Stability of acetylene/methane and acetylene/hydrogen/methane gas mixtures at elevated temperatures and pressures
by
Bullerwell, J.
,
Kenchenpur, A.
,
Whidden, T.K.
Published in
Fuel (Guildford)
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Modeling of silicon dioxide chemical Vapor Deposition from tetraethoxysilane and ozone
by
ROMET, S
,
COUTURIER, M. F
,
WHIDDEN, T. K
Published in
Journal of the Electrochemical Society
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The use of electron beam exposure and chemically enhanced vapor etching of SiO2 for nanoscale fabrication
by
Kozicki, M.N.
,
Allgair, J.
,
Jenkins-Gray, A.
,
Ferry, D.K.
,
Whidden, T.K.
Published in
Physica. B, Condensed matter
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In-situ process control for semiconductor manufacturing
by
Taylor, J.H.
,
Whidden, T.K.
,
Zhao Xiaozhong
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Conference Proceeding
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Self-assembled monolayer resists and nanoscale lithography of silicon dioxide thin films by chemically enhanced vapor etching (CEVE)
by
Pan, M.
,
Yun, M.
,
Kozicki, M.N.
,
Whidden, T.K.
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Superlattices and microstructures
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