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Bulk-micromachined test structure for fast and reliable determination of the lateral thermal conductivity of thin films
by
LA SPINA, Luigi
,
VAN HERWAARDEN, Alexander W
,
SCHELLEVIS, Hugo
,
WIEN, Wim H. A
,
NENADOVIC, Nebojsa
,
NANVER, Lis K
Published in
Journal of microelectromechanical systems
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Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly
by
Henneken, V.A.
,
Sassen, W.P.
,
van der Vlist, W.
,
Wien, W.H.A.
,
Tichem, M.
,
Sarro, P.M.
Published in
Journal of microelectromechanical systems
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MEMS test structure for measuring thermal conductivity of thin films
by
La Spina, L.
,
Nenadovic, N.
,
van Herwaarden, A.W.
,
Schellevis, H.
,
Wien, W.H.A.
,
Nanver, L.K.
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