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Optical deflection measurement for characterization of microelectromechanical systems (MEMS)
by
Firebaugh, S.L.
,
Charles, H.K.
,
Edwards, R.L.
,
Keeney, A.C.
,
Wilderson, S.F.
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IEEE transactions on instrumentation and measurement
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Dielectric Charge Measurement in Capacitive Microwave Shunt Switches
by
Schultz, J.S.
,
Firebaugh, S.L.
,
Charles, H.K.
,
Edwards, R.L.
,
Keeney, A.C.
,
Wilderson, S.F.
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Ieee Transactions On Instrumentation And Measurement
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Micromechanical Devices
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Bridge Circuits
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Calibration
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Charge Measurement
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Communication Switching
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Conductors
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Dielectric Charging
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Dielectric Measurements
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Displacement Measurement
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Electrostatics
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Engineering
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Engineering, Electrical & Electronic
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Instruments & Instrumentation
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Mems
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Microelectromechanical Devices
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Microelectromechanical Systems
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Micromachining
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Microwave
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Optical Fiber Sensors
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Optical Fibers
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