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High-frequency method to determine SiC crystal conductivity
by
Shturbin, A.V.
,
Titkov, I.E.
,
Panevin, V.Yu
,
Witman, R.F.
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Materials science in semiconductor processing
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Optical diagnostic of silicon carbide based on differential reflectance spectroscopy
by
Shturbin, A.V.
,
Titkov, I.E.
,
Panevin, V.Yu
,
Vorobjev, L.E.
,
Witman, R.F.
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Conference Proceeding
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Materials Science In Semiconductor Processing
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Silicon Carbide
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