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High-resolution, low-cost microsensors for networked sensing systems: Optical nanospectrometers with nanoimprinted cavities of filter arrays
by
Xiaolin Wang
,
Albrecht, Alla
,
Schudy, Sabrina
,
Woit, Tatjana
,
Daneker, Vadim
,
Schultz, Karin
,
Hanh Hong Mai
,
Kohler, Florestan
,
Wittzack, Stefan
,
Bartels, Martin
,
Hillmer, Hartmut
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Conference Proceedings
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3D Nanoimprint
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Distributed Bragg Reflectors
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Fabry-Perot Filter Arrays
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Low-Cost Batch Process
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Networked Microsensors
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Optical Nanospectrometers
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Ieee Electronic Library (Iel) Conference Proceedings
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