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Microstructure and morphology of SiOx film deposited by APCVD
by
ZHANG, Ji-Liang
,
JIAN LI
,
LUO, Lai-Ma
,
WO, Yin-Hua
Published in
Journal of alloys and compounds
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Microstructure and morphology of SiO x film deposited by APCVD
by
Zhang, Ji-liang
,
Li, Jian
,
Luo, Lai-ma
,
Wo, Yin-hua
Published in
Journal of alloys and compounds
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Journal Of Alloys And Compounds
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Amorphous Materials
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Microstructure
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Thin Films
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Transmission Electron Microscopy
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Vapor Deposition
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Structure And Morphology; Thickness
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