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Ge Precursors for Strained Si and Compound Semiconductors
by
Woelk, Eghert
,
Shenai, Deo
,
Storck, Peter
,
Sagnes, Isabelle
Published in
Semiconductor International
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Semiconductor International
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Atmospheric Pressure
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Chemical Vapor Deposition
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Process Engineering
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Quantum Dots
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Semiconductors
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Silicon
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