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Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope
by
Chen, Delong
,
Zhou, Jielin
,
Zhang, Yanjun
,
Xiao, Erbo
,
Ge, Jinguo
,
Li, Quantong
,
Liu, Zhuming
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Experimental Method Research on Non-linear Characteristics of Static Friction Coefficient to Temperature
by
Li, Erbo
,
Zhang, Zhijing
,
Wang, Zifu
,
Chen, Xiao
,
Zhang, Tingyu
Published in
Journal of physics. Conference series
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A Multilayer Nested Space Ray Telescope Assembly and Adjustment System Based on Online Monitoring Feedback
by
Li, Erbo
,
Zhang, Zhijing
,
Su, Taiyu
,
Xiong, Jian
,
Chen, Xiao
Published in
Procedia CIRP
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Sub-micron Assembly Alignment Detection Method and System Based on Optical Diffraction
by
Su, Taiyu
,
Zhang, Zhijing
,
Jin, Xin
,
Chen, Xiao
,
Xiong, Jian
,
Li, Erbo
Published in
Procedia CIRP
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