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Influence of boron ion implantation on the mechanics and electret properties of Si3N4 single layer film by XIAOQING ZHANG, ZHONGFU XIA, YONGGANG PAN, YEWEN ZHANG

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Influence of boron ion implantation on the mechanics and electret properties of Si/sub 3/N/sub 4/ single layer film by Xiaoqing Zhang, Zhongfu Xia, Yonggang Pan, Yewen Zhang

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Mechanistic property and charge storage in amorphous Si/sub 3/N/sub 4/ electret film by Xiaoqing Zhang, Yewen Zhang, Yonggang Pan, Zhongfu Xia, Xianghuai Liu, Baoqing Li, Zixin Lin

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