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Characteristics of Atmospheric-Pressure DC Glow Discharge in Pin–Plate Electrodes by Gas Flow Stabilization Method
by
Hattori, Kunihiko
,
Yamada, Haruyosi
,
Kumagai, Tomoyuki
,
Ando, Akira
,
Inutake, Masaaki
Published in
Japanese Journal of Applied Physics
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Cu interconnect technologies in Fujitsu and problems in installing Cu equipment in an existing semiconductor manufacturing line
by
Yamada, M.
,
Yagi, H.
,
Sugatani, S.
,
Miyajima, M.
,
Matsunaga, D.
,
Hosoda, T.
,
Kudo, H.
,
Misawa, N.
,
Nakamura, T.
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Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
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Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers
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Japanese Journal Of Applied Physics. Part. 1, Regular Papers, Brief Communications & Review Papers
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Subjects
Applied Sciences
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Atmospheric Pressure Glow Discharge
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Auxiliary Flow
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Dc Discharge
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Design. Technologies. Operation Analysis. Testing
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Electronic Equipment And Fabrication. Passive Components, Printed Wiring Boards, Connectics
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Gas Flow
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Metallization, Contacts, Interconnects; Device Isolation
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Microelectronic Fabrication
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Microelectronics: Lsi, Vlsi, Ulsi; Integrated Circuit Fabrication Technology
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