River valley-inspired, high-sensitivity, and rapid-response capacitive three-dimensional force tactile sensor based on U-shaped groove structure by Xu, Decheng, Hong, Weiqiang, Hu, Bing, Zhang, Tianxu, Chen, Dongliang, Yan, Zihao, Yao, Xiaomeng, Zhang, Xinyi, Zhao, Yunong, Sun, Taoran, Zhang, Chuanzhao, Pan, Mingqi, Ruan, Xiaoyun, Yan, Ruishen, Wang, Junyi, Guo, Xiaohui

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