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Electrical characteristics investigation of ferroelectric memories using stacked and mixed hafnium zirconium oxides
by
Fang, Yi-Wei
,
Yang, Zih-Jing
,
Liao, Ruo-Yin
,
Chen, Pei-Tien
,
Liu, Cun-Bo
,
Huang, Kai-Yang
,
Hsu, Hsiao-Hsuan
,
Cheng, Chun-Hu
,
Chou, Wu-Ching
,
Lin, Shih-Hao
,
Zhou, Ye
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Thin solid films
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Thin Solid Films
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Ferroelectric
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Hafnium Zirconium Oxide
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Materials Science
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Materials Science, Coatings & Films
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Nitrogen Plasma
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