Search Results - Yathapu, Nithin

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  1. 1
    450mm metrology and inspection: The current state and the road ahead

    450mm metrology and inspection: The current state and the road ahead by Cottle, Rand, Yathapu, Nithin, Sieg, Katherine

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  2. 2
    Leveraging blanket wafer film inspection to efficiently characterize root cause for lithographic micro-masking patterning defects

    Leveraging blanket wafer film inspection to efficiently characterize root cause for lithographic micro-masking patterning defects by Ramaswamy, S, Yathapu, N, Lembach, G, Guse, M, Linnane, M

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  3. 3
    450mm Cu single damascene BEOL process with 20nm half-pitched features

    450mm Cu single damascene BEOL process with 20nm half-pitched features by Sunoo Kim, Dunn, Shannon, Smith, Steven, Collision, WenLi, Prudhomme, Jamie, Huey-Ming Wang, Maniscalco, Joe, Yathapu, Nithin, Chulgi Song, Wang, Barry, Carr, Christopher, Hsi-Wen Liu, Gall, Bruce, Alaestante, Angelo, Min-Hui Chen, Conti, Richard, ChungJu Yang, Sullivan, Denis, Culafi, Kosta, Moon, BumKi, Yii-Cheng Lin, Yu-Lieh Fu, Sieg, Katherine, Larrea, Anne-Sophie, Fish, Norman, Swaine, Regina, Bialy, Alexander, Tallon, Milo, Stapf, Gerard, Hagwood, John, Bryant, Michael, Cottle, Rand, Chang, Stock, Kelling, Mark, Schaefer, Karsten, Franca, Dan, Pinyen Lin, Borst, Christopher, Kwangwook Lee, JongHeun Lim, Skilbred, David, Chien, Cc, Robertson, Frank, Fria, Erin

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