Search Results - Yeng-Kaung Peng

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  1. 1
    Analysis of the impact of proximity correction algorithms on circuit performance

    Analysis of the impact of proximity correction algorithms on circuit performance by Li Chen, Milor, L.S., Ouyang, C.H., Maly, W., Yeng-Kaung Peng

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  2. 2
    An analytical model of multiple ILD thickness variation induced by interaction of layout pattern and CMP process

    An analytical model of multiple ILD thickness variation induced by interaction of layout pattern and CMP process by Ouyang, C., Ryu, K., Milor, L., Maly, W., Hill, G., Peng, Y.-K.

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  3. 3
    Statistical process simulation with neural network single step feed-back for automatic process monitoring and control

    Statistical process simulation with neural network single step feed-back for automatic process monitoring and control by Chen, V.M.C., Yung-Tao Lin, Yeng-Kaung Peng

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  4. 4
    Method of failure analysis with cad layout navigation and FIB/SEM inspection

    Method of failure analysis with cad layout navigation and FIB/SEM inspection by Peng, Yeng-Kaung, Vo Thao, H, Wong Paul, M

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  5. 5
    Integrated statistical process and device simulation system with automatic calibration using single-step feedback and backpropagation neural network

    Integrated statistical process and device simulation system with automatic calibration using single-step feedback and backpropagation neural network by Chen, V.M.C., Yung-Tao Lin, Yeng-Kaung Peng

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  6. 6
    Application of in-situ particle monitoring in defect management system under clean manufacturing environment

    Application of in-situ particle monitoring in defect management system under clean manufacturing environment by Chen, V.M.C., Apple Wanyee Chow, Milor, L., Yeng-Kaung Peng

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  7. 7
    100% defect inspection with neural network integrated system of in-situ particle monitor and surfscan

    100% defect inspection with neural network integrated system of in-situ particle monitor and surfscan by Chen, V.M.C., Chow, A.W., Yung-Tao Lin, Yeng-Kaung Peng

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