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Ion beam deposition of permanent magnet layers for liftoff processes
by
Hegde, Hari
,
Wang, Jinsong
,
Devasahayam, Adrian J.
,
Kanarov, Viktor
,
Hayes, Alan
,
Yevtukhov, Rustam
,
Bozeman, Steve
,
Anderson, Paul
,
Tabat, Ned
,
Ryan, Patrick
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
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Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
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Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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American Institute Of Physics
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