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    Thin-film ZnO as micromechanical actuator at low frequencies

    Thin-film ZnO as micromechanical actuator at low frequencies by Blom, F.R., Yntema, D.J., Van De Pol, F.C.M., Elwenspoek, M., Fluitman, J.H.J., Popma, T.H.J.A.

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