Search Results - Yoshinaga, Keinosuke

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    Numerically controlled atmospheric-pressure plasma sacrificial oxidation using electrode arrays for improving silicon-on-insulator layer uniformity

    Numerically controlled atmospheric-pressure plasma sacrificial oxidation using electrode arrays for improving silicon-on-insulator layer uniformity by Takei, Hiroyasu, Yoshinaga, Keinosuke, Matsuyama, Satoshi, Yamauchi, Kazuto, Sano, Yasuhisa

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    Improvement of Thickness Uniformity of Silicon on Insulator Layer by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma with Electrode Array System

    Improvement of Thickness Uniformity of Silicon on Insulator Layer by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma with Electrode Array System by Kamisaka, Shohei, Yoshinaga, Keinosuke, Sano, Yasuhisa, Mimura, Hidekazu, Matsuyama, Satoshi, Yamauchi, Kazuto

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